SK Hynix Develops Neon Gas Recycling Technology with Domestic Materials and Components Suppliers

Resolving Supply and Demand Uncertainty and Improving the Environment

On the 1st, SK Hynix announced that it has developed the semiconductor industry's first neon (Ne) gas recycling technology in collaboration with TEMC, a domestic special gas company for semiconductors. As uncertainties in neon supply, which had been dependent on imports, increased due to recent international geopolitical instability, the company developed recycling technology with a domestic materials and equipment company, achieving results in just over a year.

Neon is a type of rare gas (an industrial gas that exists only in trace amounts in the air and cannot be artificially manufactured). It is also a major component of excimer laser gas, which is essential in the photolithography process that draws circuits on semiconductor wafers (silicon discs) using lasers. Neon has the characteristic of being chemically stable and not decomposing or transforming when used as a laser light source, making it recyclable.

SK Hynix and TEMC succeeded in developing a technology that collects neon gas, which was previously released into the air through scrubbers (devices that filter and remove gases and compounds generated during semiconductor production processes) after the photolithography process, into collection tanks, and then separates and purifies only neon through TEMC's gas treatment process. The purified neon will be reused in SK Hynix's semiconductor manufacturing processes.

SK Hynix stated, "This technology development is the result of close collaboration based on the expertise of materials and equipment partners in each field," and added, "We plan to further develop partnerships with specialized collaborators going forward."

Applying neon recycling technology to semiconductor fabs (factories) could reduce neon purchase costs by approximately 40 billion KRW annually. It is also expected to reduce annual greenhouse gas emissions (Scope 3, including emissions inside and outside the business site) from neon production by about 12,000 tons.

SK Hynix plans to recycle all materials in semiconductor processes that are chemically stable and do not decompose or transform. Earlier, in February, the company announced a 'Mid- to Long-term Roadmap for Using Recycled Materials,' setting a goal to increase the proportion of recycled materials to 25% by 2025 and over 30% by 2030.

This content was produced with the assistance of AI translation services.