[AirUP, On Site] Accelerating Localization of 'Ultrapure Water,' a Key Material in Semiconductor Processes

Essential Raw Material Ultra-Pure Water for Processing and Washing
Strengthening Industry-Academia-Research Collaboration Network
Platform Center to be Established by 2027
Research Budget of 28 Billion KRW Invested
Efforts Focused on Expert Training

A researcher from the Korea Water Resources Corporation is inspecting the ultrapure water pilot plant equipment.

Korea Water Resources Corporation is accelerating the localization of ultrapure water, a core material in semiconductor processes. To ensure uninterrupted supply of ultrapure water, an essential raw material for semiconductor processing and cleaning, the corporation plans to strengthen its collaboration network among industry, academia, and research institutes, and establish an ultrapure water platform center by 2027, aiming to achieve technological independence.

Ultrapure water is water closest to theoretical pure water, with impurities such as electrolytes, organic matter, microorganisms, and living bacteria in the water suppressed to extremely low levels (total organic carbon 1 ppb or less, one-billionth). It is widely used in integrated circuit manufacturing and wafer cleaning for semiconductor, LCD, and solar panel production. Producing ultrapure water requires the highest level of water treatment technology, which is possessed only by some advanced countries worldwide. While domestic companies participate partially in construction and operation in the semiconductor ultrapure water field, they still rely on foreign companies for infrastructure design and construction due to difficulties in verification, scale-up, and commercialization.

According to Global Water Intelligence (GWI), a global water business research organization, the global ultrapure water market is expected to grow from 20 trillion KRW in 2020 to 23 trillion KRW in 2024 due to increasing global semiconductor demand, making technological independence in related fields a key issue for semiconductor powerhouse status. The government is concerned that, similar to the case of hydrogen fluoride, an essential semiconductor material, during the 2019 trade conflict with Japan, the strategic designation of ultrapure water could cause significant damage.

To address this, the Korea Water Resources Corporation has invested 28 billion KRW in research costs since last year and started operating an ultrapure water demonstration plant within SK Siltron in Gumi, Gyeongbuk, aiming to develop technology for the localization of high-purity industrial water production processes by 2025. The corporation is proceeding in two phases targeting a daily production capacity of 2,400 tons of ultrapure water. The first phase is scheduled for completion in October, after which it will produce 1,200 tons of ultrapure water daily. Furthermore, within the next three years, it plans to promote full localization covering design, construction, and operation of high-purity industrial water. In April, it also laid the foundation for mutual cooperation to activate domestic ultrapure water through a memorandum of understanding with Samsung Electronics.

The corporation’s efforts for ultrapure water technological independence began 10 years ago. In 2011, it collaborated with small and medium enterprises to install and operate pilot plants, accumulating production capabilities and securing technology. In 2013, it independently built a semiconductor ultrapure water production pilot plant (25㎥/day) to research demonstration technologies for design, construction, and operation. This effort resulted in a patent (Registration No. 10-1788696) that enables stable ultrapure water production while reducing chemical usage.

Separately, the corporation aims to complete the policy establishment and construction of a tangible and intangible platform called the “Ultrapure Water Platform Center” by 2027. The center will function as a hub for domestic technological independence through an ultrapure water analysis center, performance verification center, demonstration plant, ultrapure water supply plant and wastewater reuse facility, and education and research center. In particular, the ultrapure water analysis center is expected to secure various solutions for related production processes by accumulating a database (DB) of analysis results.

The corporation is also committed to nurturing experts. In November last year, it participated in the establishment of the Korean Ultrapure Water Society, striving for research and development and dissemination of technological advancements related to ultrapure water production. Since the end of last year, it has collaborated with leading domestic universities such as Sangmyung University, Korea University, Seoul National University, and KAIST, as well as ultrapure water professional operators, to develop the country’s first ultrapure water educational materials. It also opened the nation’s first ultrapure water expert training course with KAIST and has been conducting training since March this year.

Support for semiconductor manufacturing companies will also be strengthened. The corporation plans to secure technology capable of providing stable water services without interruption throughout the entire water supply process from raw water to ultrapure water for production companies, while linking with small and medium enterprises to support joint overseas expansion. A Korea Water Resources Corporation official said, “Through water supply based on domestic technology, we expect to further strengthen the semiconductor industry, a national foundational project, and enable stable and economical operation.”

This content was produced with the assistance of AI translation services.