[Click eStock] "Park Systems, Increasing AFM Demand in DRAM Fine Process"
[Asia Economy Reporter Jang Hyowon] NH Investment & Securities on the 16th raised the target price of Park Systems from 130,000 KRW to 170,000 KRW, expecting that the use of AFM in the semiconductor market will expand and that shipments of EUV mask repair equipment will be reflected in the performance.
Park Systems recorded sales of 53.3 billion KRW and operating profit of 18.5 billion KRW in the fourth quarter of last year, increasing by 44.3% and 36.8% respectively compared to the previous quarter. The expansion of processes requiring AFM observation in logic processes below 5nm and DRAM processes below 14nm led to increased equipment orders and deliveries.
Do Hyunwoo, a researcher at NH Investment & Securities, explained, "Park Systems is expected to benefit from EUV-related processes," adding, "Orders for the NX-Mask, an EUV mask repair equipment developed by the company, are active."
Researcher Do said, "Masks are prone to defects and particles in the patterns. Since EUV masks cost around 1 billion KRW each, it is advantageous to repair defective products for reuse," and added, "EUV photomasks have small patterns, making repair difficult with existing equipment."
He analyzed, "Park Systems developed equipment suitable for EUV through defect measurement and probe technology based on atomic force microscopy," and noted, "The expected increase in AFM utilization in next-generation post-process hybrid bonding is also a momentum."
Furthermore, he stated, "AFM use has begun for observing roughness and Cu pad shapes in hybrid bonding processes, and TSMC has been mass-producing 3D SoIC processes using hybrid bonding since 2022," predicting, "The market will expand this year."
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