TMC Wins Patent Lawsuit Against Integris in the US

[Asia Economy Reporter Hyungsoo Park] TMC, a leading domestic company in semiconductor specialty gases, announced on the 1st that it won a patent lawsuit filed by Entegris Inc., a Nasdaq-listed company in the United States, against TMC regarding safety containers for semiconductor ion implantation. The mass supply of TMC's domestically produced products is expected to expand further.

Entegris filed a patent infringement injunction and damages lawsuit at the Seoul District Court against the safety container developed by TMC. The Patent Trial and Appeal Board ruled in favor of TMC, declaring the patent invalid. The Seoul District Court also dismissed the case, and the lawsuit was completely concluded in about two years without further appeals. This recognized TMC's independent technology.

The safety container at the center of the patent dispute functions to block the leakage of highly toxic specialty gases used in semiconductor processes. It is installed and used inside the clean room where ion implantation equipment operates. TMC succeeded in developing and manufacturing the safety container through its own technology. It has been supplying customers in earnest since 2021.

Before TMC's development, Entegris and Linde plc led the supply. With TMC's victory in the patent rights case, the opportunity to supply TMC products in the semiconductor specialty gas market is expected to increase.

TMC CEO Wonyang Yoo said, "We are relieved that TMC's technology was recognized through the lawsuit," and explained, "Our ultimate value is to stably supply materials and reduce dependence on overseas sources."

TMC, which received preliminary review approval for listing on the KOSDAQ market earlier last month, is expanding its new product lines while building various business models such as rare gas recycling and expanding cryogenic gas production.

This content was produced with the assistance of AI translation services.