by Jang Hyowon
Published 24 Sep.2024 08:02(KST)
Wizit announced on the 24th that it has filed a patent for an eco-friendly cleaning method aimed at reusing core components of semiconductor and display manufacturing equipment, the first of its kind in Korea.
Components used in semiconductor and display manufacturing processes are exposed to high-frequency plasma and etching gases, so they are protected by forming a film with excellent plasma resistance.
Additionally, it is necessary to perform regeneration work to remove fine contamination generated during the manufacturing process and to enable the reuse of expensive process equipment components. Currently, the cleaning methods applied in regeneration work are complex and time-consuming.
The patented technology offers ▲significantly reduced cleaning time compared to conventional technologies ▲prevention of product damage during the cleaning process ▲complete cleaning using eco-friendly substances harmless to humans, which the company explains can help manufacturers reduce production costs.
A Wizit representative stated, “This patented technology increases the reliability of cleaning products while lowering production costs,” and added, “We will continue to play a leading role in the semiconductor and display materials, parts, and equipment (SoBuJang) market through ongoing research and development.”
Meanwhile, Wizit produces consumable parts for equipment used in semiconductor and display manufacturing processes and supplies them to major domestic and international semiconductor and display manufacturers.
In particular, the company holds 19 patents related to the manufacturing of semiconductor and display equipment parts. Last year, it was designated as a commercialization facility for ‘national strategic technology’ producing advanced memory semiconductors (DRAM, NAND flash, high-bandwidth memory) materials and parts.
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